Journal of Microelectromechanical Systems
Journal of Microelectromechanical Systems > 2014 > 23 > 5 > 1208 - 1218
Journal of Microelectromechanical Systems > 2014 > 23 > 5 > 1237 - 1248
Journal of Microelectromechanical Systems > 2014 > 23 > 5 > 1164 - 1181
Journal of Microelectromechanical Systems > 2014 > 23 > 5 > 1198 - 1207
Journal of Microelectromechanical Systems > 2014 > 23 > 5 > 1025 - 1035
Journal of Microelectromechanical Systems > 2014 > 23 > 5 > 1009 - 1011
Journal of Microelectromechanical Systems > 2014 > 23 > 5 > C2
Journal of Microelectromechanical Systems > 2014 > 23 > 5 > C3
Journal of Microelectromechanical Systems > 2014 > 23 > 5 > C1 - C4
Journal of Microelectromechanical Systems > 2014 > 23 > 5 > 1015 - 1024
Journal of Microelectromechanical Systems > 2014 > 23 > 5 > 1045 - 1053
Journal of Microelectromechanical Systems > 2014 > 23 > 5 > 1012 - 1014
Journal of Microelectromechanical Systems > 2014 > 23 > 5 > 1036 - 1044
Journal of Microelectromechanical Systems > 2014 > 23 > 5 > 1054 - 1062
Journal of Microelectromechanical Systems > 2014 > 23 > 5 > 1112 - 1120
Journal of Microelectromechanical Systems > 2014 > 23 > 5 > 1141 - 1155
Journal of Microelectromechanical Systems > 2014 > 23 > 5 > 1084 - 1093
Journal of Microelectromechanical Systems > 2014 > 23 > 5 > 1101 - 1111
Journal of Microelectromechanical Systems > 2014 > 23 > 5 > 1094 - 1100
Journal of Microelectromechanical Systems > 2014 > 23 > 5 > 1073 - 1083